High energy and high dose ion implantation : proceedings of Symposium C on High Energy Ion Implantation and Symposium D on Ion Beam Synthesis of Compound and Elemental Layers of the 1991 E-MRS Spring Conference, Strasbourg, France, May 28-31, 1991 / edited by S.U. Campisano ... [et al.]
(European Materials Research Society symposia proceedings ; v. 23)
データ種別 | 図書 |
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著者標目 | *Symposium C on High Energy Ion Implantation (1991 : Strasbourg, France) Campisano, S. U. European Materials Research Society Symposium D on Ion Beam Synthesis of Compound and Elemental Layers (1991 : Strasbourg, France) |
出版情報 | Amsterdam ; New York : North-Holland , c1992 |
書誌詳細を非表示
巻次 | ISBN:0444894187 |
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大きさ | xi, 308 p. : ill. ; 27 cm |
本文言語 | 英語 |
一般注記 | Includes bibliographical references and index |
分 類 | LCC:IN PROCESS |
書誌ID | 1000004571 |
ISBN | 0444894187 |
NCID | BA19228325 |