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Proceedings of the sixth International Symposiumon Silicon Materials Science and Technology / edited by Howard R. Huff, Takao Abe, Bernd Kolbesen
(Proceedings / [Electrochemical Society] ; v.90-7 . Semiconductor silicon ; 1990)

データ種別	図書
著者標目	*International Symposium on Silicon Materials Science and Technology (6th : 1990 : Montreal) Huff, Howard R. Barraclough, Keith G.
出版者	Pennington : The Electrochemical Society
出版年	c1990