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Handbook of silicon based MEMS materials and technologies / Veikko Lindroos ... [et al.]
(Micro & nano technologies)
| データ種別 | 電子ブック |
|---|---|
| 著者標目 | Lindroos, Veikko |
| 出版情報 | Amsterdam ; Boston : William Andrew/Elsevier , 2010 |
書誌詳細を非表示
| 版 | 1st ed |
|---|---|
| 巻次 | electronic bk. ; ISBN:9780080947723 electronic bk. ; ISBN:0080947727 hbk. ; XISBN:9780815515944 hbk. ; XISBN:0815515944 |
| 大きさ | 1 online resource (xxxii, 636 p.) : ill |
| 内容注記 | Front Cover; Handbook of Silicon Based MEMS Materials and Technologies; Copyright Page; Contents; Preface; List of Contributors; Overview; PART I: Silicon as MEMS Material; PART II: Modeling in MEMS Methods; PART III: Measuring MEMS; PART IV: Micromachining Technologies in MEMS; PART V: Encapsulation of MEMS Components; Appendix 1 Common Abbreviations and Acronyms; Appendix 2 Nanoindentation Characterization of Silicon and other MEMS Materials; Index |
| 一般注記 | Includes bibliographical references and index A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. .. Key topics covered include: ..: .. ..; Silicon as MEMS material ..; Material properties and measurement techniques ..; Analytical methods used in materials characterization ..; Modeling in MEMS ..; Measuring MEMS ..; Micromachining technologies in MEMS ..; Encapsulation of MEMS components ..; Emerging process technologies, including ALD and porous silicon .. .. .. Written by 73 world class MEMS contributors from around the glo |
| 件 名 | LCSH:Microelectromechanical systems LCSH:Microelectromechanical systems -- Materials 全ての件名で検索 LCSH:Silicon -- Electric properties 全ての件名で検索 FREE:TECHNOLOGY & ENGINEERING -- Electronics -- Solid State 全ての件名で検索 FREE:TECHNOLOGY & ENGINEERING -- Electronics -- Semiconductors 全ての件名で検索 FREE:MEMS FREE:Silicium FREE:Electronic books |
| 分 類 | DC22:621.38152 |
| 書誌ID | OB00000907 |
| ISBN | 9780080947723 |
| NCID | LB40001610 |