Fundamentals of microfabrication and nanotechnology / Marc J. Madou
| データ種別 | 図書 |
|---|---|
| 著者標目 | Madou, Marc J. |
| 出版情報 | Boca Raton : CRC Press , c2012 |
子書誌情報を非表示
| 1 | v. 1 Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology / Marc J. Madou : hardback. - Boca Raton : CRC Press , c2012 |
| 2 | v. 2 Manufacturing techniques for microfabrication and nanotechnology / Marc J. Madou : hardback. - Boca Raton : CRC Press , c2012 |
| 3 | v. 3 From MEMS to Bio-MEMS and Bio-NEMS : manufacturing techniques and applications / Marc J. Madou : hardback. - Boca Raton : CRC Press , c2012 |
書誌詳細を非表示
| 版 | 3rd ed |
|---|---|
| 大きさ | 3 v. ; 29 cm |
| 本文言語 | und |
| 書誌ID | 1000209350 |
| NCID | BB06582045 |

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