Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology / editors, H.R. Huff, L. Fabry, S. Kishino ; sponsoring division, Electronics
(Proceedings / [Electrochemical Society] ; v. 2002-2)
データ種別 | 図書 |
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著者標目 | *International Symposium on Silicon Materials Science and Technology (9th : 2002 : Philadelphia) Huff, Howard R. Fabry, Laszlo Kishino, Seigo Electrochemical Society. Electronics Division |
出版情報 | Pennington, NJ : The Electrochemical Society , c2002 |
書誌詳細を非表示
巻次 | : set ; ISBN:1566773741 v. 1 ; ISBN:1566773687 v. 2 ; ISBN:1566773733 |
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大きさ | 2 v. (xx, 1074 p.) : ill. ; 24 cm |
本文言語 | 英語 |
一般注記 | "... the Ninth International Symposium on Silicon Materials Science and Technology, held May 13-17, 2002 in Philadelphia during the centennial anniversary of The Electrochemical Society, Inc" --on pref. Includes bibliographical references and index |
書誌ID | 1000162787 |
ISBN | 1566773741 |
NCID | BA60982595 |