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Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology / editors, H.R. Huff, L. Fabry, S. Kishino ; sponsoring division, Electronics
(Proceedings / [Electrochemical Society] ; v. 2002-2)

データ種別 図書
著者標目 *International Symposium on Silicon Materials Science and Technology (9th : 2002 : Philadelphia)
Huff, Howard R.
Fabry, Laszlo
Kishino, Seigo
Electrochemical Society. Electronics Division
出版情報 Pennington, NJ : The Electrochemical Society , c2002

所蔵情報を非表示

小金井・別置図書室 v. 1 547 60474923
1566773687
小金井・別置図書室 v. 2 547 60474935
1566773733

書誌詳細を非表示

巻次 : set ; ISBN:1566773741
v. 1 ; ISBN:1566773687
v. 2 ; ISBN:1566773733
大きさ 2 v. (xx, 1074 p.) : ill. ; 24 cm
本文言語 英語
一般注記 "... the Ninth International Symposium on Silicon Materials Science and Technology, held May 13-17, 2002 in Philadelphia during the centennial anniversary of The Electrochemical Society, Inc" --on pref.
Includes bibliographical references and index
書誌ID 1000162787
ISBN 1566773741
NCID BA60982595