Mendeley出力
Nanolithography : a borderland between STM, EB, IB, and X-ray lithographies / edited by M. Gentili, C. Giovannella, and S. Selci
(NATO ASI series ; ser. E . Applied sciences ; v. 264)
| データ種別 | 図書 |
|---|---|
| 著者標目 | *NATO Advanced Research Workshop on "Nanolithography: a Borderland Betweeen STM, EB, IB, and X-Ray Lithographies" (1993 : Frascati, Italy) Gentili, M. Giovannella, Carlo Selci, S. North Atlantic Treaty Organization. Scientific Affairs Division |
| 出版情報 | Dordrecht ; Boston : Kluwer Academic Publishers , 1994 |
書誌詳細を非表示
| 巻次 | ISBN:0792327942 |
|---|---|
| 大きさ | xii, 215 p. : ill. ; 25 cm |
| 本文言語 | 英語 |
| 一般注記 | "Proceedings of the NATO Advanced Research Workshop on Nanolithography: a Borderland between STM, EB, IB, and X-Ray Lithographies, Frascati, Roma, Italy, April 6-8, 1993"--T.p. verso "Published in cooperation with NATO Scientific Affairs Division." Includes index |
| 件 名 | LCSH:Molecular electronics -- Congresses
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LCSH:Microlithography -- Congresses 全ての件名で検索 LCSH:Nanotechnology -- Congresses 全ての件名で検索 LCSH:Integrated circuits -- Design and construction -- Congresses 全ての件名で検索 |
| 分 類 | LCC:TK7874.8 DC20:621.3815/31 |
| 書誌ID | 1000057239 |
| ISBN | 0792327942 |
| NCID | BA22470329 |