Mendeley出力
Handbook of contamination control in microelectronics : principles, applications, and technology / edited by Donald L. Tolliver
(Materials science and process technology series)
| データ種別 | 図書 |
|---|---|
| 著者標目 | Tolliver, Donald L. |
| 出版情報 | Park Ridge, N.J., U.S.A. : Noyes Publications , c1988 |
書誌詳細を非表示
| 巻次 | ISBN:0815511515 ; PRICE:$78.00 |
|---|---|
| 大きさ | xxi, 488 p. : ill. ; 25 cm |
| 本文言語 | 英語 |
| 一般注記 | Includes bibliographies and index |
| 件 名 | LCSH:Integrated circuits -- Design and construction
全ての件名で検索
LCSH:Contamination (Technology) |
| 分 類 | LCC:TK7836 DC19:621.381/73 NDC8:549.7 |
| 書誌ID | 1000031783 |
| ISBN | 0815511515 |
| NCID | BA12919951 |