Multicomponent and multilayered thin films for advanced microtechnologies : techniques, fundamentals, and devices / edited by Orlando Auciello and Jürgen Engemann
(NATO ASI series ; ser. E . Applied sciences ; v. 234)
データ種別 | 図書 |
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著者標目 | *NATO Advanced Study Institute on Multicomponent and Multilayered Thin Films for Advanced Microtechnologies (1992 : Bad Windsheim, Germany) Auciello, Orlando, 1945- Engemann, Jürgen North Atlantic Treaty Organization. Scientific Affairs Division |
出版者 | Dordrecht ; Boston : Kluwer |
出版年 | c1993 |
書誌詳細を非表示
巻次 | ISBN:0792322657 |
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大きさ | xv, 633 p. : ill. ; 25 cm |
本文言語 | 英語 |
一般注記 | "Proceedings of the NATO Advanced Study Institute on Multicomponent and Multilayered Thin Films for Advanced Microtechnologies, Bad indsheim, Germany, September 21 - October 2, 1992"--T.p. verso Published in cooperation with NATO Scientific Affairs Division Includes index |
件 名 | LCSH:Thin film devices -- Congresses
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LCSH:Thin films -- Congresses 全ての件名で検索 |
分 類 | LCC:TK7872.T55 DC20:621.3815 |
書誌ID | 1000001085 |
ISBN | 0792322657 |
NCID | BA20386017 |