Mendeley出力
Single chamber processing : proceedings of the joint session on single chamber processing : requirements and challenges of the 1992 E-MRS Spring Meeting Conference, Strasbourg, France, June 2-5, 1992 / edited by Yves I. Nissim, Avishay Katz
(European Materials Research Society symposia proceedings ; v. 37)
| データ種別 | 図書 |
|---|---|
| 著者標目 | *European Materials Research Society. Meeting (1992 : Strasbourg, France) Nissim, Yves I., 1953- Katz, Avishay |
| 出版者 | Amsterdam ; New York : North-Holland |
| 出版年 | 1993 |
書誌詳細を非表示
| 巻次 | ISBN:0444899154 |
|---|---|
| 大きさ | x, 162 p. : ill. ; 29 cm |
| 本文言語 | 英語 |
| 一般注記 | Includes bibliographical references |
| 件 名 | LCSH:Semiconductors -- Design and construction -- Congresses
全ての件名で検索
LCSH:Vacuum technology -- Congresses 全ての件名で検索 |
| 分 類 | LCC:TK7871.85 DC20:621.3815 |
| 書誌ID | 1000005587 |
| ISBN | 0444899154 |
| NCID | BA21392252 |