Mendeley出力
Multicomponent and multilayered thin films for advanced microtechnologies : techniques, fundamentals, and devices / edited by Orlando Auciello and Jürgen Engemann
(NATO ASI series ; ser. E . Applied sciences ; v. 234)
| データ種別 | 図書 |
|---|---|
| 著者標目 | *NATO Advanced Study Institute on Multicomponent and Multilayered Thin Films for Advanced Microtechnologies (1992 : Bad Windsheim, Germany) Auciello, Orlando, 1945- Engemann, Jürgen North Atlantic Treaty Organization. Scientific Affairs Division |
| 出版者 | Dordrecht ; Boston : Kluwer |
| 出版年 | c1993 |
書誌詳細を非表示
| 巻次 | ISBN:0792322657 |
|---|---|
| 大きさ | xv, 633 p. : ill. ; 25 cm |
| 本文言語 | 英語 |
| 一般注記 | "Proceedings of the NATO Advanced Study Institute on Multicomponent and Multilayered Thin Films for Advanced Microtechnologies, Bad indsheim, Germany, September 21 - October 2, 1992"--T.p. verso Published in cooperation with NATO Scientific Affairs Division Includes index |
| 件 名 | LCSH:Thin film devices -- Congresses
全ての件名で検索
LCSH:Thin films -- Congresses 全ての件名で検索 |
| 分 類 | LCC:TK7872.T55 DC20:621.3815 |
| 書誌ID | 1000001085 |
| ISBN | 0792322657 |
| NCID | BA20386017 |