MEMS Materials and Processes Handbook / edited by Reza Ghodssi, Pinyen Lin
(MEMS Reference Shelf)
データ種別 | 電子ブック |
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著者標目 | *Ghodssi, Reza Lin, Pinyen SpringerLink (Online service) |
出版情報 | Boston, MA : Springer Science+Business Media, LLC , 2011 |
書誌詳細を非表示
巻次 | ISBN:9780387473185 |
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大きさ | v.: digital |
本文言語 | 英語 |
件 名 | LCSH:Engineering LCSH:Electronics LCSH:Systems engineering LCSH:Materials LCSH:Surfaces (Physics) FREE:Engineering FREE:Electronics and Microelectronics, Instrumentation FREE:Materials Science, general FREE:Circuits and Systems FREE:Surfaces and Interfaces, Thin Films |
書誌ID | OB00003842 |
ISBN | 9780387473185 |
NCID | LB40006761 |