OPAC

Microdevices : physics and fabrication technologies

データ種別	図書
出版者	New York : Plenum Press


1	Semiconductor lithography : principles, practices, and materials / Wayne M. Moreau New York : Plenum Press , c1988
2	Field emission in vacuum microelectronics / George Fursey ; Edited by Ivor Brodie, Paul Schwoebel : pbk. - New York : Kluwer Academic/Plenum Publishers , c2010