Mendeley出力
Chemical Mechanical Planarization : proceedings of the International Symposium / editors, R.L. Opila ... [et al.]
(Proceedings / [Electrochemical Society] ; v. 2000-26, 2002-1, 2003-21)
| データ種別 | 図書 |
|---|---|
| 著者標目 | International Symposium on Chemical Mechanical Planarization Opila, Robert Leon, 1953- Electrochemical Society. Dielectric Science and Technology Division Electrochemical Society. Meeting |
| 出版情報 | Pennington, N.J. : Electrochemical Society , c2001-2003 |
書誌詳細を非表示
| 巻次 | IV ; ISBN:1566772931 V ; ISBN:1566773296 VI ; ISBN:1566774047 |
|---|---|
| 大きさ | 3 v. : ill. ; 24 cm |
| 本文言語 | 英語 |
| 一般注記 | "Dielectric Science and Technology and Electronics Divisions"--on IV T.p IV:"... held at the 198th Meeting of The Electrochemical Society held in Phoenix, AZ from October 23 to October 25, 2000"--on p. iii V:"... held at the 201st Meeting of the Electrochemical Society, in Philadelphia, Pennsylvania from May 12th to 17th, 2002" --on p. iii VI:"... held at the 204th Meeting of the Electrochemical Society, in Orlando, Florida from October 12th to 17th, 2003" --on p. iii IV: viii, 338 p. V: vii, 274 p. VI: vii, 358 p. Includes bibliographical references and indexes |
| 書誌ID | 1000119214 |
| ISBN | 1566772931 |
| NCID | BA54501502 |