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Symposium on the Deposition of Thin Films, Rochester, New York, June 9, 1966 / by sputtering, co-sponsored by the University of Rochester and Consolidated Vacuum Corporation

データ種別	図書
著者標目	Symposium on the Deposition of Thin Films (1966 : Rochester, N.Y.) University of Rochester Consolidated Vacuum Corporation
出版情報	[New York] : [Univ. of Rochester] , [1966]