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Photon, beam and plasma assisted processing : proceedings of Symposium B on Photon, Beam and Plasma Assisted Processing Fundamentals and Device Technology of the 1988 E-MRS Spring Conference, Strasbourg, France, 31 May to 2 June 1988 / edited by I.W. Boyd and E.F. Krimmel
(European Materials Research Society symposia proceedings ; v. 2)

データ種別	図書
著者標目	Boyd, Ian W. Krimmel, E. F. Symposium B on Photon, Beam, and Plasma Assisted Processing Fundamentals and Device Technology (1988 : Strasbourg, France)
出版者	Amsterdam : North-Holland
出版年	1989