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The physics and chemistry of SiO[2] and the Si-SiO[2] interface 2 / edited by C. Robert Helms and Bruce E. Deal

データ種別 図書
著者標目 Helms, C. Robert
Deal, Bruce E.
Electrochemical Society. Electronics Division
Electrochemical Society. Dielectric Science and Technology Division
Symposium on the Physics and Chemistry of the SiO[2] and Si-SiO[2] Interface (2nd : 1992 : St. Louis, Mo.)
出版者 New York : Plenum Press
出版年 c1993

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小金井・別置図書室 2 431/PP2 60044716


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巻次 ISBN:0306444194
大きさ xvi , 503p. ; 26cm
本文言語 英語
一般注記 Proceedings of the Second Symposium on the Physics and Chemistry of the SiO[2] and Si-SiO[2] Interface, held May 18-21, 1992, in St. Louis, Missouri, sponsored by the Electronics Division and the Dielectric Science and Technology Division of the Electrochemical Society
Includes bibliographical references and index
件 名 LCSH:Silica -- Surfaces -- Congresses  全ての件名で検索
LCSH:Dielectrics -- Surfaces -- Congresses  全ての件名で検索
LCSH:Silicon dioxide films -- Congresses  全ての件名で検索
LCSH:Surface chemistry -- Congresses  全ての件名で検索
LCSH:Surfaces (Technology) -- Congresses  全ての件名で検索
分 類 LCC:QC585.75.S55
DC20:546/.6832
書誌ID 1000005634
ISBN 0306444194
NCID BA21102079

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